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Thermal oxidation

Thermal oxidation

Process creating a thin layer of (usually) silicon dioxide.

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  1. Silicon dioxide

    Oxide of silicon.

    26%

  2. Microfabrication

    Fabrication at micrometre scales and smaller.

    14%

  3. Oxide

    Chemical compound with an oxygen atom.

    9.3%

  4. Wafer (electronics)

    Thin slice of semiconductor used for the fabrication of integrated circuits.

    6.5%

Readers come from

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  1. MOSFET

    Type of field-effect transistor.

    69%

  2. Semiconductor device fabrication

    Manufacturing process used to create integrated circuits.

    15%

  3. Silicon dioxide

    Oxide of silicon.

    4.8%

  4. Corrosion

    Gradual destruction of materials by chemical reaction with its environment.

    2.2%

  5. Planar process

    Process used to make microchips.

    2.2%

  6. Thermal barrier coating

    Form of exhaust heat management.

    2%