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Electron-beam lithography

Electron-beam lithography

Lithographic technique that uses a scanning beam of electrons.

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  1. Photolithography

    Process in microfabrication.

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    Lithography using 13.5 nm UV light.

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    Used to create structures that only measure nanometers.

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Share of the 1,040 readers arriving from another article

  1. Lithography

    Printing technique.

    30%

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    Lithographic technique that uses X-rays instead of light.

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  3. Photolithography

    Process in microfabrication.

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    Elementary particle with negative charge.

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    Technique used to increase the number of structures a microchip may contain.

    5.7%

  6. Photomask

    Photolithographic tool.

    2%

  7. Nanolithography

    Used to create structures that only measure nanometers.

    1.2%

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    Chemical compound.

    1.1%