X-ray lithography
X-ray lithography
Lithographic technique that uses X-rays instead of light.
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Readers' pathsAug 2026 – Oct 2026
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EUV lithography
Lithography using 13.5 nm UV light.
25%
Electron-beam lithography
Lithographic technique that uses a scanning beam of electrons.
17%
LIGA
Fabrication technology used to create high-aspect-ratio microstructures.
12%
Semiconductor device fabrication
Manufacturing process used to create integrated circuits.
12%
Photolithography
Process in microfabrication.
9.6%
Excimer laser
Type of ultraviolet laser important in chip manufacturing and eye surgery.
9.1%
Photoresist
Light-sensitive material used in making electronics.
3.7%
X-ray
Form of electromagnetic radiation.
3.4%
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